@article {5541,
	title = {Nanostructured silicon films produced by PECVD},
	journal = {MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS},
	volume = {664},
	year = {2001},
	note = {n/a},
	pages = {A9. 6-A9. 6},
	publisher = {Warrendale, Pa.; Materials Research Society; 1999},
	abstract = {n/a},
	isbn = {0272-9172},
	author = {Martins, R. and Aguas, H. and Silva, V. and Ferreira, I. and Cabrita, A. and Fortunato, E.}
}
