@article {5541, title = {Nanostructured silicon films produced by PECVD}, journal = {MATERIALS RESEARCH SOCIETY SYMPOSIUM PROCEEDINGS}, volume = {664}, year = {2001}, note = {n/a}, pages = {A9. 6-A9. 6}, publisher = {Warrendale, Pa.; Materials Research Society; 1999}, abstract = {n/a}, isbn = {0272-9172}, author = {Martins, R. and Aguas, H. and Silva, V. and Ferreira, I. and Cabrita, A. and Fortunato, E.} }