Investigation of the amorphous to microcrystalline phase transition of thin film silicon produced by PECVD
- Citation:
- Martins, R., A. Macarico, I. Ferreira, R. Nunes, A. Bicho, and E. Fortunato. "Investigation of the amorphous to microcrystalline phase transition of thin film silicon produced by PECVD." Thin solid films. 317.1 (1998): 144-148.
Abstract:
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Notes:
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