Investigation of the amorphous to microcrystalline phase transition of thin film silicon produced by PECVD

Citation:
Martins, R., A. Macarico, I. Ferreira, R. Nunes, A. Bicho, and E. Fortunato. "Investigation of the amorphous to microcrystalline phase transition of thin film silicon produced by PECVD." Thin solid films. 317.1 (1998): 144-148.

Abstract:

n/a

Notes:

n/a