@article {5495,
	title = {Investigation of the amorphous to microcrystalline phase transition of thin film silicon produced by PECVD},
	journal = {Thin solid films},
	volume = {317},
	year = {1998},
	note = {n/a},
	pages = {144-148},
	publisher = {Elsevier},
	abstract = {n/a},
	isbn = {0040-6090},
	author = {Martins, R. and Macarico, A and Ferreira, I. and Nunes, R and Bicho, A. and Fortunato, E.}
}
