Influence of Hydrogen Gas Dilution on the Properties of Silicon-Doped Thin Films Prepared by the Hot-Wire Plasma-Assisted Technique

Citation:
Braz Fernandes, Francisco Manuel, Isabel Ferreira, Rodrigo Martins, Paula M. Vilarinho, and Elvira Fortunato. "Influence of Hydrogen Gas Dilution on the Properties of Silicon-Doped Thin Films Prepared by the Hot-Wire Plasma-Assisted Technique." Key Engineering Materials. 230 (2002): 591-594.

Abstract:

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