@article {5636,
	title = {Influence of Hydrogen Gas Dilution on the Properties of Silicon-Doped Thin Films Prepared by the Hot-Wire Plasma-Assisted Technique},
	journal = {Key Engineering Materials},
	volume = {230},
	year = {2002},
	note = {n/a},
	pages = {591-594},
	abstract = {n/a},
	isbn = {0878499059},
	author = {Braz Fernandes, Francisco Manuel and Ferreira, Isabel and Martins, Rodrigo and Vilarinho, Paula M and Fortunato, Elvira}
}
