Growth of Polymorphous/Nanocrystalline Silicon Films Deposited by PECVD at 13.56 MHz
- Citation:
- Pereira, LuÍs, Isabel Ferreira, Rodrigo Martins, Hugo Águas, Elvira Fortunato, Leandro Raniero, S. Zang, and L. Boufendi. "Growth of Polymorphous/Nanocrystalline Silicon Films Deposited by PECVD at 13.56 MHz." Materials Science Forum. 455 (2004): 532-535.
Abstract:
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Notes:
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