@article {5596,
	title = {Growth of Polymorphous/Nanocrystalline Silicon Films Deposited by PECVD at 13.56 MHz},
	journal = {Materials Science Forum},
	volume = {455},
	year = {2004},
	note = {n/a},
	pages = {532-535},
	abstract = {n/a},
	isbn = {0878499415},
	author = {Pereira, Lu{\'I}s and Ferreira, Isabel and Martins, Rodrigo and {\'A}guas, Hugo and Fortunato, Elvira and Raniero, Leandro and Zang, S and Boufendi, L}
}
