Composition, Structure and Optical Characteristics of Polymorphous Silicon Films Deposited by PECVD at 27.12 MHz
- Citation:
- Ferreira, Isabel, Rodrigo Martins, Pere Roca i Cabarrocas, Hugo Águas, Elvira Fortunato, and Leandro Raniero. "Composition, Structure and Optical Characteristics of Polymorphous Silicon Films Deposited by PECVD at 27.12 MHz." Materials Science Forum. 455 (2004): 100-103.
Abstract:
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Notes:
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