@article {5626,
	title = {Composition, Structure and Optical Characteristics of Polymorphous Silicon Films Deposited by PECVD at 27.12 MHz},
	journal = {Materials Science Forum},
	volume = {455},
	year = {2004},
	note = {n/a},
	pages = {100-103},
	abstract = {n/a},
	isbn = {0878499415},
	author = {Ferreira, Isabel and Martins, Rodrigo and Roca i Cabarrocas, Pere and {\'A}guas, Hugo and Fortunato, Elvira and Raniero, Leandro}
}
