Role of the rf frequency on the structure and composition of polymorphous silicon films | Hugo Águas

Role of the rf frequency on the structure and composition of polymorphous silicon films

Citation:: Aguas, H., L. Raniero, L. Pereira, A. S. Viana, E. Fortunato, and R. Martins. "Role of the rf frequency on the structure and composition of polymorphous silicon films." Journal of non-crystalline solids. 338 (2004): 183-187.

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