@article {aguas2004role,
	title = {Role of the rf frequency on the structure and composition of polymorphous silicon films},
	journal = {Journal of non-crystalline solids},
	volume = {338},
	year = {2004},
	note = {n/a},
	pages = {183{\textendash}187},
	publisher = {Elsevier},
	abstract = {n/a},
	author = {Aguas, H. and Raniero, L. and Pereira, L. and Viana, A. S. and Fortunato, E. and Martins, R.}
}
