Polymorphous Silicon Films Produced in Large Area Reactors by PECVD at 27.12 MHz and 13.56 MHz | Hugo Águas

Polymorphous Silicon Films Produced in Large Area Reactors by PECVD at 27.12 MHz and 13.56 MHz

Citation:: Águas, H., L. Raniero, L. Pereira, E. Fortunato, Roca P. i Cabarrocas, and R. Martins. "Polymorphous Silicon Films Produced in Large Area Reactors by PECVD at 27.12 MHz and 13.56 MHz." MRS Proceedings. Vol. 762. Cambridge University Press, 2003. A5-13.

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