@conference {aguas2003polymorphous,
	title = {Polymorphous Silicon Films Produced in Large Area Reactors by PECVD at 27.12 MHz and 13.56 MHz},
	booktitle = {MRS Proceedings},
	volume = {762},
	year = {2003},
	note = {n/a},
	pages = {A5{\textendash}13},
	publisher = {Cambridge University Press},
	organization = {Cambridge University Press},
	abstract = {n/a},
	author = {{\'A}guas, H. and Raniero, L. and Pereira, L. and Fortunato, E. and i Cabarrocas, P Roca and Martins, R.}
}
