Polymorphous silicon deposited in large area reactor at 13 and 27 MHz
- Citation:
- Aguas, H., Roca P. i Cabarrocas, S. Lebib, V. Silva, E. Fortunato, and R. Martins. "Polymorphous silicon deposited in large area reactor at 13 and 27 MHz." Thin Solid Films. 427 (2003): 6-10.
Abstract:
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Notes:
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