@article {aguas2003polymorphous,
	title = {Polymorphous silicon deposited in large area reactor at 13 and 27 MHz},
	journal = {Thin Solid Films},
	volume = {427},
	number = {1},
	year = {2003},
	note = {n/a},
	pages = {6{\textendash}10},
	publisher = {Elsevier},
	abstract = {n/a},
	author = {Aguas, H. and i Cabarrocas, P Roca and Lebib, S and Silva, V. and Fortunato, E. and Martins, R.}
}
