Influence of the Plasma Regime on the Structural, Optical, Electrical and Morphological Properties of a-Si: H Thin Films

Citation:
Águas, Hugo, Rodrigo Martins, Yuri Nunes, Manuel JP Maneira, and Elvira Fortunato. "Influence of the Plasma Regime on the Structural, Optical, Electrical and Morphological Properties of a-Si: H Thin Films." Materials Science Forum. Vol. 382. Trans Tech Publications, 2001. 11-20.

Abstract:

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