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\'c1guas, Hugo, Rodrigo Martins, Yuri Nunes, Manuel JP Maneira, and Elvira Fortunato. "Influence of the Plasma Regime on the Structural, Optical, Electrical and Morphological Properties of a-Si: H Thin Films." \i Materials Science Forum\i0 . Vol. 382. Trans Tech Publications,  2001. 11-20.\par \par }