Influence of the deposition conditions on the properties of titanium oxide produced by rf magnetron sputtering

Citation:
Barquinha, P., L. Pereira, H. Aguas, E. Fortunato, and R. Martins. "Influence of the deposition conditions on the properties of titanium oxide produced by rf magnetron sputtering." Materials science in semiconductor processing. 7 (2004): 243-247.

Abstract:

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