@article {barquinha2004influence,
	title = {Influence of the deposition conditions on the properties of titanium oxide produced by rf magnetron sputtering},
	journal = {Materials science in semiconductor processing},
	volume = {7},
	number = {4},
	year = {2004},
	note = {n/a},
	pages = {243{\textendash}247},
	publisher = {Elsevier},
	abstract = {n/a},
	author = {Barquinha, P. and Pereira, L. and Aguas, H. and Fortunato, E. and Martins, R.}
}
