Dual DC magnetron cathode co-deposition of (Al,Ti) and (Al,Ti,N) thin films with controlled depth composition

Citation:
Dual DC magnetron cathode co-deposition of (Al,Ti) and (Al,Ti,N) thin films with controlled depth composition, Nunes, Y., Wemans A., Marques H. P., Marques C., Ferreira Q., Teodoro O. M. N. D., Alves E., and Maneira M. J. P. , Vacuum, Volume 81, Issue 11-12, p.1503-1506, (2007)