Breakdown in planar magnetron discharges of argon on copper
- Citation:
- Breakdown in planar magnetron discharges of argon on copper,
Nunes, Y., Wemans A., Gordo P. R., Teixeira M. R., and Maneira M. J. P.
, Vacuum, Volume 81, Issue 11-12, p.1511-1514, (2007)