Highly sensitive ZnO ozone detectors at room temperature

Citation:
Bender, M.a, Fortunato Nunes Ferreira Marques Martins Katsarakis Cimalla Kiriakidis E. b P. b. "Highly sensitive ZnO ozone detectors at room temperature." Japanese Journal of Applied Physics, Part 2: Letters. 42 (2003): L435-L437.

Abstract:

In this letter we compare the room temperature ozone sensing properties of intrinsic zinc oxide (ZnO) thin films deposited by spray pyrolysis, dc and r.f. magnetron sputtering. Their sensor response exceeds 8 orders of magnitude when the film structure is constituted by nanocrystallites. These preliminary results clearly demonstrate that the films could be potentially used for ozone detection at room temperature.

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