Low temperature processed hafnium oxide: Structural and electrical properties

Citation:
Pereira, L., P. Barquinha, E. Fortunato, and R. Martins. "Low temperature processed hafnium oxide: Structural and electrical properties." Materials Science in Semiconductor Processing. 9 (2006): 1125-1132.

Abstract:

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Notes:

Times Cited: 21Symposium on Characterization of High-K Dielectric Materials held at the 2006 E-MRS Spring MeetingMay 29-jun 02, 2006Nice, FRANCEEuropean Mat Res Soc

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