- Citation:
- Pereira, L., P. Barquinha, E. Fortunato, and R. Martins. "Influence of the oxygen/argon ratio on the properties of sputtered hafnium oxide." Materials Science and Engineering B-Solid State Materials for Advanced Technology. 118 (2005): 210-213.
Abstract:
n/a
Notes:
Times Cited: 33Symposium on Functional Oxides for Advanced Semiconductor TechnologiesMay 24-28, 2004Strasbourg, FRANCEUniv Degli Studi Catania; Natl Inst Sci & Technol Mat
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