@article {8013,
	title = {Influence of the oxygen/argon ratio on the properties of sputtered hafnium oxide},
	journal = {Materials Science and Engineering B-Solid State Materials for Advanced Technology},
	volume = {118},
	number = {1-3},
	year = {2005},
	note = {<p>Times Cited: 33Symposium on Functional Oxides for Advanced Semiconductor TechnologiesMay 24-28, 2004Strasbourg, FRANCEUniv Degli Studi Catania; Natl Inst Sci \&amp; Technol Mat</p>
},
	month = {Apr 25},
	pages = {210-213},
	abstract = {n/a},
	isbn = {0921-5107},
	url = {<Go to ISI>://WOS:000228514800045},
	author = {Pereira, L. and Barquinha, P. and Fortunato, E. and Martins, R.}
}
