Sintering Behavior of Nano‐and Micro‐Sized ZnO Powder Targets for rf Magnetron Sputtering Applications

Citation:
Neves, Nuno, Raquel Barros, Elsa Antunes, Isabel Ferreira, Joao Calado, Elvira Fortunato, and Rodrigo Martins. "Sintering Behavior of Nano‐and Micro‐Sized ZnO Powder Targets for rf Magnetron Sputtering Applications." Journal of the American Ceramic Society. 95.1 (2012): 204-210.

Abstract:

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