Silicon Films Produced by PECVD Under Powder Formation Conditions
- Citation:
- Ferreira, Isabel, Rodrigo Martins, A. Cabrita, Hugo Águas, V. Silva, and Elvira Fortunato. "Silicon Films Produced by PECVD Under Powder Formation Conditions." Materials Science Forum. 382 (2001): 21-30.
Abstract:
n/a
Notes:
n/a