Role of ion bombardment and plasma impedance on the performances presented by undoped a-Si: H films

Citation:
Martins, R., H. Aguas, I. Ferreira, V. Silva, A. Cabrita, and E. Fortunato. "Role of ion bombardment and plasma impedance on the performances presented by undoped a-Si: H films." Thin solid films. 383.1 (2001): 165-168.

Abstract:

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Notes:

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