Role of the gas pressure and hydrogen dilution on the properties of large area nanocrystalline p-type silicon films produced by hot wire technique

Citation:
Ferreira, I., A. Cabrita, F. Braz Fernandes, E. Fortunato, and R. Martins. "Role of the gas pressure and hydrogen dilution on the properties of large area nanocrystalline p-type silicon films produced by hot wire technique." Materials Science and Engineering: C. 15.1 (2001): 141-144.

Abstract:

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