From porous to compact films by changing the onset conditions of HW-CVD process
- Citation:
- Ferreira, I., M. E. V. Costa, E. Fortunato, and R. Martins. "From porous to compact films by changing the onset conditions of HW-CVD process." Thin solid films. 427.1 (2003): 225-230.
Abstract:
n/a
Notes:
n/a
