Mass spectroscopy analysis during the deposition of a-SiC: H and aC: H films produced by hot wire and hot wire plasma-assisted techniques

Citation:
Ferreira, I., V. Silva, H. Aguas, E. Fortunato, and R. Martins. "Mass spectroscopy analysis during the deposition of a-SiC: H and aC: H films produced by hot wire and hot wire plasma-assisted techniques." Applied surface science. 184.1 (2001): 60-65.

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