Influence of the H2 Dilution And Filament Temperature on the Properties of P Doped Silicon Carbide Thin Films Produced by Hot-Wire Technique

Citation:
Ferreira, I., H. Aguas, L. Mendes, F. FERNANDES, E. Fortunato, and R. Martins. "Influence of the H2 Dilution And Filament Temperature on the Properties of P Doped Silicon Carbide Thin Films Produced by Hot-Wire Technique." MRS Proceedings. 507.1 (1998).

Abstract:

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