Dependence of the Strains and Residual Mechanical Stresses on the Performances Presented by a‐Si: H Thin Film Position Sensors

Citation:
Fortunato, Elvira, Donatelo Brida, Luis Pereira, Hugo Águas, Vitor Silva, Isabel Ferreira, M. F. M. Costa, Vasco Teixeira, and Rodrigo Martins. "Dependence of the Strains and Residual Mechanical Stresses on the Performances Presented by a‐Si: H Thin Film Position Sensors." Advanced Engineering Materials. 4.8 (2002): 612-616.

Abstract:

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