Characterization of silicon carbide thin films prepared by VHF-PECVD technology

Citation:
Zhang, S., L. Raniero, E. Fortunato, L. Pereira, N. Martins, P. Canhola, I. Ferreira, N. Nedev, H. Águas, and R. Martins. "Characterization of silicon carbide thin films prepared by VHF-PECVD technology." Journal of non-crystalline solids. 338 (2004): 530-533.

Abstract:

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Notes:

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