Batch Processing Method to Deposit a-Si: H Films by PECVD

Citation:
Pereira, LuÍs, Isabel Ferreira, Rodrigo Martins, Hugo Águas, Elvira Fortunato, and Leandro Raniero. "Batch Processing Method to Deposit a-Si: H Films by PECVD." Materials Science Forum. 455 (2004): 104-107.

Abstract:

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