Silicon Films Produced by PECVD under Powder Formation Conditions | Hugo Águas

Silicon Films Produced by PECVD under Powder Formation Conditions

Citation:: Martins, Rodrigo, Hugo Águas, V. Silva, Isabel Ferreira, A. Cabrita, and Elvira Fortunato. "Silicon Films Produced by PECVD under Powder Formation Conditions." Materials Science Forum. Vol. 382. Trans Tech Publications, 2001. 21-30.

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