Role of substrate on the growth process of polycrystalline silicon thin films by low-pressure chemical vapour deposition
- Citation:
- Pereira, Lu{\'ıs, Hugo Águas, Leandro Raniero, Rui Miguel S. Martins, Elvira Fortunato, and Rodrigo Martins. "Role of substrate on the growth process of polycrystalline silicon thin films by low-pressure chemical vapour deposition." Materials Science Forum. Vol. 455. Trans Tech Publications, 2004. 112-115.
Abstract:
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Notes:
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