Role of substrate on the growth process of polycrystalline silicon thin films by low-pressure chemical vapour deposition

Citation:
Pereira, Lu{\'ıs, Hugo Águas, Leandro Raniero, Rui Miguel S. Martins, Elvira Fortunato, and Rodrigo Martins. "Role of substrate on the growth process of polycrystalline silicon thin films by low-pressure chemical vapour deposition." Materials Science Forum. Vol. 455. Trans Tech Publications, 2004. 112-115.

Abstract:

n/a

Notes:

n/a