Nanostructured silicon films produced by PECVD
- Citation:
- Martins, R., H. Aguas, V. Silva, I. Ferreira, A. Cabrita, and E. Fortunato. "Nanostructured silicon films produced by PECVD." MRS Proceedings. Vol. 664. Cambridge University Press, 2001. A9-6.
Abstract:
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Notes:
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