Nanostructured silicon based thin film transistors processed in the plasma dark region | Hugo Águas

Nanostructured silicon based thin film transistors processed in the plasma dark region

Citation:: Pereira, L., H. Aguas, L. Gomes, P. Barquinha, E. Fortunato, and R. Martins. "Nanostructured silicon based thin film transistors processed in the plasma dark region." Journal of nanoscience and nanotechnology. 10 (2010): 2938-2943.

Abstract:

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