Highly conductive/transparent ZnO: Al thin films deposited at room temperature by rf magnetron sputtering

Citation:
Fortunato, Elvira, Patr{\'ıcia Nunes, António Marques, Daniel Costa, Hugo Águas, Isabel Ferreira, Maria Elisabete V. Costa, and Rodrigo Martins. "Highly conductive/transparent ZnO: Al thin films deposited at room temperature by rf magnetron sputtering." Key Engineering Materials. Vol. 230. Trans Tech Publications, 2002. 571-574.

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