Fast and cheap method to qualitatively measure the thickness and uniformity of ZrO 2 thin films | Hugo Águas

Fast and cheap method to qualitatively measure the thickness and uniformity of ZrO 2 thin films

Citation:: Águas, Hugo, António Marques, Rodrigo Martins, and Elvira Fortunato. "Fast and cheap method to qualitatively measure the thickness and uniformity of ZrO 2 thin films." Materials Science in Semiconductor Processing. 4 (2001): 319-321.

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