Electronic, Optoelectronic, Spintronic and Ferroelectric Materials-Role of Substrate on the Growth Process of Polycrystalline Silicon Thin Films by Low-Pressure Chemical Vapour Deposition
- Citation:
- Pereira, L., H. Aguas, L. Raniero, R. M. S. Martins, E. Fortunato, and R. Martins. "Electronic, Optoelectronic, Spintronic and Ferroelectric Materials-Role of Substrate on the Growth Process of Polycrystalline Silicon Thin Films by Low-Pressure Chemical Vapour Deposition." Materials Science Forum. Vol. 455. Aedermannsdorf, Switzerland: Trans Tech Publications, 1984-, 2004. 112-115.
Abstract:
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Notes:
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