Effect of the discharge frequency and impedance on the structural properties of polymorphous silicon | Hugo Águas

Effect of the discharge frequency and impedance on the structural properties of polymorphous silicon

Citation:: Águas, H., L. Raniero, L. Pereira, E. Fortunato, and R. Martins. "Effect of the discharge frequency and impedance on the structural properties of polymorphous silicon." Thin solid films. 451 (2004): 264-268.

Abstract:

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