Composition, structure and optical characteristics of polymorphous silicon films deposited by PECVD at 27.12 MHz

Citation:
Martins, Rodrigo, Hugo Águas, Isabel Ferreira, Elvira Fortunato, Leandro Raniero, and Pere Roca i Cabarrocas. "Composition, structure and optical characteristics of polymorphous silicon films deposited by PECVD at 27.12 MHz." Materials Science Forum. Vol. 455. Trans Tech Publications, 2004. 100-103.

Abstract:

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