The influence of deposition parameters on the growth of a-SiGe: H alloys in a plasma CVD system

Citation:
Zeman, M., I. Ferreira, MJ Geerts, and JW Metselaar. "The influence of deposition parameters on the growth of a-SiGe: H alloys in a plasma CVD system." Applied Surface Science. 46.1 (1990): 245-248.

Abstract:

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