@inbook {1084,
	title = {Sputtering preparation of silicon nitride thin films for gate dielectric applications},
	booktitle = {Advanced Materials Forum Ii},
	series = {Materials Science Forum},
	volume = {455-456},
	year = {2004},
	note = {<p>Times Cited: 0 Pereira, L Aguas, H Igreja, R Martins, RMS Nedev, N Raniero, L Fortunato, E Martins, R 2nd International Materials Symposium APR 14-16, 2003 Caparica, PORTUGAL</p>
},
	pages = {69-72},
	abstract = {n/a},
	author = {Pereira, L. and Aguas, H. and Igreja, R. and Martins, R. M. S. and Nedev, N. and Raniero, L. and Fortunato, E. and Martins, R.},
	editor = {Martins, R. and Fortunato, E. and Ferreira, I. and Dias, C.}
}
