IN-SITU STUDY OF THE PREFERENTIAL ORIENTATION OF MAGNETRON SPUTTERED Ni-Ti THIN FILMS AS A FUNCTION OF BIAS AND SUBSTRATE TYPE | rjcs

IN-SITU STUDY OF THE PREFERENTIAL ORIENTATION OF MAGNETRON SPUTTERED Ni-Ti THIN FILMS AS A FUNCTION OF BIAS AND SUBSTRATE TYPE

Citation:: Martins, Rui M. S., NORBERT SCHELL, Manfred Beckers, Arndt Muecklich, Helfried Reuther, Rui JC Silva, Karimbi K. Mahesh, Braz F. M. Fernandes, B. Berg, MR Mitchell, and J. Proft. "IN-SITU STUDY OF THE PREFERENTIAL ORIENTATION OF MAGNETRON SPUTTERED Ni-Ti THIN FILMS AS A FUNCTION OF BIAS AND SUBSTRATE TYPE." Smst 2006: Proceedings of the International Conference on Shape Memory and Superelastic Technologies (2008): 363-372.

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