Publications

Export 575 results:
Sort by: Author [ Title  (Asc)] Type Year
A B C D E F G H I J K L M N O P Q R S T U V W X Y Z 
I
Lavareda, G., Fortunato Carvalho C.Nunes Martins E. R. "Improved a-Si:H TFT performance using a-Six-Ni1-x/a-SixC1-x stack dielectrics." Materials Research Society Symposium - Proceedings. Vol. 424. 1996. 59-64. Abstract

In this paper we present a study on the electrical characteristics (conductivity, σ and relative dielectric constant, εr) of amorphous silicon nitride (a-SixN1-x) and carbide (a-SixC1-x) films deposited by PECVD, used as dielectric materials in TFT devices, aiming to select the most adequate alloy that lead to improve device performances. Besides that, double stack a-SixN1-x/a-SixC1-x structures were developed and applied as dielectric layers on TFTs, whose performances show to be superior to those ones using single silicon nitride or silicon carbide as dielectric.

Martins, R., Ferreira Cabrita Fortunato I. A. E. "Improvement of a-Si:H device stability and performances by proper design of the interfaces." Journal of Non-Crystalline Solids. 266-269 B (2000): 1094-1098. AbstractWebsite

This paper deals with a new design method for the interfaces of a-Si:H pin solar cells that improves the stability and performances of devices deposited in a single batch chamber process. The method consists in removing a deposited sacrificial layer placed between the p/i and/or i/n interfaces by etching. This layer is an absorber of defects and impurities that are introduced in the interfaces, mainly from the chamber walls cross-contamination and the substrate surface. The results achieved increase the device fill factor and short circuit current density, respectively towards 75% and 16.3 mA cm-2, with a final efficiency of about 10%, before light soaking experiments. © 2000 Elsevier Science B.V. All rights reserved.

de Nunes de Carvalho, C., Nijs Ferreira Fortunato Martins J. M. M. I. "Improvement of the ITO-p interface in a-Si:H solar cells using a thin SiO intermediate layer." Materials Research Society Symposium - Proceedings. Vol. 420. 1996. 861-865. Abstract

The use of ITO thin films on glass/ITO/p-i-n/metal amorphous silicon solar cells is reviewed. It is suggested a new application for silicon monoxide thin films on the ITO-p interface, as an intermediate layer, to minimize the ITO thin film deterioration process, during the early stage of exposure to a silane plasma rich in hydrogen. The thickness of the silicon monoxide thin films is chosen not to worsen the optical and electrical properties of the ITO thin films. The ITO-p interface is optimized (due to impurities diffusion decrease), leading to an overall improvement of the device performance.

dede Carvalho, C.Nunes, Nijs Ferreira Fortunato Martins J. M. M. I. "Improvement of the ITO-P interface in a-Si:H solar cells using a thin SiO intermediate layer." Materials Research Society Symposium - Proceedings. Vol. 426. 1996. 25-29. Abstract

The use of ITO films on glass/ITO/p-i-n/metal amorphous silicon solar cells is reviewed. It is suggested a new application for silicon monoxide thin films on the ITO-p interface, as an intermediate layer, to minimize the ITO thin film deterioration process, during the early stage of exposure to a silane plasma rich in hydrogen. The thickness of the silicon monoxide thin films is chosen not to worsen the optical and electrical properties of the ITO thin films. The ITO-p interface is optimized (due to impurities diffusion decrease), leading to an overall improvement of the device performance.

c Kiazadeh, A.a b, Gomes Barquinha Martins Rovisco Pinto Martins Fortunato H. L. b P. "Improving positive and negative bias illumination stress stability in parylene passivated IGZO transistors." Applied Physics Letters. 109 (2016). AbstractWebsite

The impact of a parylene top-coating layer on the illumination and bias stress instabilities of indium-gallium-zinc oxide thin-film transistors (TFTs) is presented and discussed. The parylene coating substantially reduces the threshold voltage shift caused by continuous application of a gate bias and light exposure. The operational stability improves by 75%, and the light induced instability is reduced by 35%. The operational stability is quantified by fitting the threshold voltage shift with a stretched exponential model. Storage time as long as 7 months does not cause any measurable degradation on the electrical performance. It is proposed that parylene plays not only the role of an encapsulation layer but also of a defect passivation on the top semiconductor surface. It is also reported that depletion-mode TFTs are less sensitive to light induced instabilities. This is attributed to a defect neutralization process in the presence of free electrons. © 2016 Author(s).

Elangovan, E., Martins Fortunato R. E. "Indium molybdenum oxide thin films: A comparative study by two different RF sputtering systems." Physica Status Solidi (A) Applications and Materials Science. 206 (2009): 2123-2127. AbstractWebsite

Indium molybdenum oxide thin films were deposited using different radio-frequency sputtering units on glass substrates at room temperature from an In 2O 3 (95 wt.%): Mo (5 wt.%) target. The film thickness ranges between 160 and 275 nm. The chamber volume of Unit-1 was ̃2.4 times larger than that of Unit-2. Apart from the chamber volume, a significant difference between the two units was the sputtering pressure. The films were characterized by their structural, morphological, optical, and electrical properties. A strong reflection from (222) plane was obtained for the ̃275 nm thick films deposited in Unit-1. The films deposited with <275 nm thickness and those deposited in Unit-2 are close to amorphous with a small crystalline fraction. The surface of the films deposited in Unit-1 is comprised of randomly arranged crystallites, which is restructured with the increasing film thickness to become a well defined "rice field" like structure (275 nm thick). The films deposited in Unit-2 are comprised of many holes on the surface that is presumably due to back sputtering. The average visible transmittance calculated in the wavelength between 400 and 800 nm ranges from 70 to 82%. The optical band gap is found to vary between 3.80 and 3.86 eV. The lowest bulk resistivity of the films deposited in Unit-1 was increased from ̃4.06×10 -3 to 4.07×10 -1ωcm when deposited in Unit-2. The carrier concentration was decreased from 1.31×10 20 to 1.03×10 18 cm -3 but the Hall mobility increased from 11.7 to 15.0 cm2 V -1 s -1. © 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.

Águas, H., Fortunato Martins E. R. "Influence of a DC grid on silane r.f. plasma properties." Vacuum. 64 (2002): 387-392. AbstractWebsite

In this work we show that it is possible to control the plasma regime in the region close to the substrate in r.f. silane discharges. The PECVD reactor works in a modified triode configuration, where the control over the plasma regime is performed by polarising a grid electrode, placed close to the r.f. electrode, with a DC power source. Besides that, the DC grid allows also to control the energy of the ion bombardment, because the plasma potential will be a function of the voltage (Vpol) applied to the DC grid. The silane plasma was characterised with a Langmuir probe and an impedance probe. We were able to identify three plasma regimes in the region close to the substrate: γ′ regime for Vpol<0 V; γ′-α regime for 0 V<Vpol<40 V; and α regime for Vpol40 V. The γ′ regime is associated with a high concentration of dust particles in plasma and high electron energy (≈8eV), while the α regime is associated with a free dust plasma and low electron energy (≈2eV). The intermediate regime, γ′-α, is characterised by the presence of smaller particles (≈2-5nm) that can be beneficial for the film's properties. © 2002 Elsevier Science Ltd. All rights reserved.

Bahubalindruni, P.G.a, Kiazadeh Sacchetti Martins Rovisco Tavares Martins Fortunato Barquinha A. b A. b. "Influence of Channel Length Scaling on InGaZnO TFTs Characteristics: Unity Current-Gain Cutoff Frequency, Intrinsic Voltage-Gain, and On-Resistance." Journal of Display Technology. 12 (2016): 515-518. AbstractWebsite

This paper presents a study concerning the role of channel length scaling on IGZO TFT technology benchmark parameters, which are fabricated at temperatures not exceeding 180\, ^{\circ}C. The parameters under investigation are unity current-gain cutoff frequency, intrinsic voltage-gain, and on-resistance of the bottom-gate IGZO TFTs. As the channel length varies from 160 to 3 μm, the measured cutoff frequency increases from 163 {\rm kHz} to 111.5 {\rm MHz}, which is a superior value compared to the other competing low-temperature thin-film technologies, such as organic TFTs. On the other hand, for the same transistor dimensions, the measured intrinsic voltage-gain is changing from 165 to 5.3 and the on-resistance is decreasing from 1135.6 to 26.1 kØmega. TFTs with smaller channel length (3 μ m) have shown a highly negative turn-on voltage and hump in the subthreshold region, which can be attributed to short channel effects. The results obtained here, together with their interpretation based on device physics, provide crucial information for accurate IC design, enabling an adequate selection of device dimensions to maximize the performance of different circuit building blocks assuring the multifunctionality demanded by system-on-panel concepts. © 2005-2012 IEEE.

Wang, J.a, Elamurugu Franco Alves Botelho Do Rego Gonçalves Martins Fortunato E. a N. b. "Influence of deposition pressure on N-doped ZnO films by RF magnetron sputtering." Journal of Nanoscience and Nanotechnology. 10 (2010): 2674-2678. AbstractWebsite

N-doped ZnO films were deposited on glass substrates by RF magnetron sputtering with different deposition pressures. The samples were characterized by X-ray diffraction (XRD), atomic force morphology (AFM), X-ray photoelectron spectroscopy (XPS), Hall measurements and optical spectrophotometer. The XRD patterns confirmed that the films are polycrystalline and the influence of deposition pressure on the structural properties. AFM microstructures also authenticated the change in the size and shape of the grains as a function of deposition pressure; the root mean square (RMS) roughness has reached a maximum (10.65 nm) at 1.5 x 10 -2 mbar. XPS spectra revealed the change in the chemical composition. The amount of adsorbed oxygen and nitrogen at oxide sites has reached the maximum at 9.0 x 10 -3 mbar, where the film showed p-type conductivity. The optical transmittance spectra have indicated that the absorption edge is shifted towards the shorter wavelength at higher deposition pressure. Correspondingly, the optical band gap is increased from 2.17 to 2.80 eV. The average visible transmittance in the wavelength ranging 500-800 nm has been increased from 49% to 82%. Copyright © 2010 American Scientific Publishers All rights reserved.

Wang, J.a, Elamurugu Sallet Lusson Amiri Jomard Martins Fortunato E. a V. b. "Influence of different carrier gases on the properties of ZnO films grown by MOCVD." Boletin de la Sociedad Espanola de Ceramica y Vidrio. 47 (2008): 242-244. AbstractWebsite

ZnO films were grown on sapphire (001) substrate by atmospheric MOCVD using diethyl zinc and tertiary butanol precursors. The influence of different carrier gases (H2 and He) on the properties was analyzed by their structural (XRD), microstructural (SEM) and compositional (SIMS) characterization. The intensity of the strongest diffraction peak from ZnO (002) plane was increased by about 2 orders of magnitude when He is used as carrier gas, indicating the significant enhancement in crystallinity. The surface of the samples grown using H2 and He carrier gases was composed of leaf-like and spherical grains respectively. Hydrogen [H] content in the film grown using H2 is higher than that using He, indicating that the [H] was influenced by the H2 carrier gas. Ultraviolet emission dominates the low temperature PL spectra. The emission from ZnO films grown using He show higher optical quality and more emission centers.

Ferreira, I., Vilarinho Fernandes Fortunato Martins P. F. E. "Influence of hydrogen gas dilution on the properties of silicon-doped thin films prepared by the hot-wire plasma-assisted technique." Key Engineering Materials. 230-232 (2002): 591-594. AbstractWebsite

P- and n-type silicon thin films have been produced using a new hot wire plasma assisted deposition process that combines the conventional plasma enhanced chemical vapor deposition and the hot wire techniques. The films were produced in the presence of different hydrogen gas flow and their optoelectronic, structural and compositional properties have been studied. The optimized optoelectronic results achieved for n-type Si:H films are conductivity at room temperature of 9.4(Ωcm)-1 and optical band gap of 2eV while for p-type SiC:H films these values are 1 × 10-2(Ωcm)-1 and 1.6eV, respectively. The films exhibit the required optoelectronic characteristics and compactness for device applications such as solar cells.

Raniero, L., Gonçalves Pimentel Ferreira Zhang Pereira Águas Fortunato Martins A. A. I. "Influence of hydrogen plasma on electrical and optical properties of transparent conductive oxides." Materials Research Society Symposium Proceedings. Vol. 862. 2005. 543-548. Abstract

In this work we study the optical and electrical behavior of ZnO:Ga, ITO and IZO films deposited on glass after sustaining different hydrogen plasma conditions and exposure times. This work was complemented by analyzing the surface morphology of the set of films, which allow us to determine the role of hydrogen plasma on the film's properties such as Hall mobility, free carrier concentration, sheet resistance, optical transmittance, figure of merit and state of the surface. Apart from that, the performances of solar cells using an intrinsic layer constituted by nanocrystalline silicon will be also presented. The data show that the electrical properties of solar cells were improved by using ZnO:Ga as front contact, allowing a high current density collection and single pin solar cells with efficiencies exceeding 11%. © 2005 Materials Research Society.

Pereira, L., Barquinha Fortunato Martins P. E. R. "Influence of metal induced crystallization parameters on the performance of polycrystalline silicon thin film transistors." Thin Solid Films. 487 (2005): 102-106. AbstractWebsite

In this work, metal induced crystallization using nickel was employed to obtain polycrystalline silicon by crystallization of amorphous films for thin film transistor applications. The devices were produced through only one lithographic process with a bottom gate configuration using a new gate dielectric consisting of a multi-layer of aluminum oxide/titanium oxide produced by atomic layer deposition. The best results were obtained for TFTs with the active layer of poly-Si crystallized for 20 h at 500 °C using a nickel layer of 0.5 nm where the effective mobility is 45.5 cm2 V-1 s-1. The threshold voltage, the on/off current ratio and the sub-threshold voltage are, respectively, 11.9 V, 5.55×104 and 2.49 V/dec. © 2005 Elsevier B.V. All rights reserved.

Wang, J.-Z.a b, Elangovan Franco Alvese Rego Martins Fortunato E. b N. c. "Influence of oxygen partial pressure on properties of N-doped ZnO films deposited by magnetron sputtering." Transactions of Nonferrous Metals Society of China (English Edition). 20 (2010): 2326-2330. AbstractWebsite

N-doped ZnO films were radio frequency (RF) sputtered on glass substrates and studied as a function of oxygen partial pressure (OPP) ranging from 3.0×10-4 to 9.5×10-3 Pa. X-ray diffraction patters confirmed the polycrystalline nature of the deposited films. The crystalline structure is influenced by the variation of OPP. Atomic force microscopy analysis confirmed the agglomeration of the neighboring spherical grains with a sharp increase of root mean square (RMS) roughness when the OPP is increased above 1.4×10-3 Pa. X-ray photoelectron spectroscopy analysis revealed that the incorporation of N content into the film is decreased with the increase of OPP, noticeably N 1s XPS peaks are hardly identified at 9.5×10-3 Pa. The average visible transmittance (380-700 nm) is increased with the increase of OPP (from ∼17 to 70), and the optical absorption edge shifts towards the shorter wavelength. The films deposited with low OPP (≤ 3.0×10-4 Pa) show n-type conductivity and those deposited with high OPP (≥ 9.0×10-4 Pa) are highly resistive (>105 ·cm) © 2010 The Nonferrous Metals Society of China.

Cui, H.-N.a, Teixeira Meng Martins Fortunato V. a L. -. "Influence of oxygen/argon pressure ratio on the morphology, optical and electrical properties of ITO thin films deposited at room temperature." Vacuum. 82 (2008): 1507-1511. AbstractWebsite

Transparent conductive oxides (TCOs) such as indium tin oxide (ITO) thin films onto glass substrates are widely used as transparent and conductive electrodes for a variety of technological applications including flat panel displays, solar cells, smart windows, touch screens, etc. ITO films on glass and polycarbonate (PC) substrates were prepared at room temperature (RT) and at different PO2. The films were characterized in terms of the surface roughness (δ), sheet resistance, the refractive index (n) and extinction coefficient (k). The free carrier density (nc) and the carrier mobility (μ) of the ITO (In2O3:Sn) films were measured and studied. The nc and μ values vary in different ratio of oxygen partial pressure (PO2) of ITO deposition. The observed changes in the ITO film resistivity are due to the combined effect of different parameter values for nc and μ. From AFM analysis and spectra calculations, the surface roughness values of the ITO films were studied and it was observed that the δ values were lower than 15 nm. The energy band gap Eg ranges from 3.26 eV to 3.66 eV as determined from the absorption spectrum. It was observed an increase on the energy band gap as the PO2 decrease in the range of 20-2% PO2. The Lorentz oscillator classical model has also been used to fit the ellipsometric spectra in order to obtain both refractive index n and extinction coefficient κ values. © 2008 Elsevier Ltd. All rights reserved.

Vieira, M., Fortunato Carvalho Lavareda Martins E. C. G. "Influence of photodegradation on the υτ and microstructure of pin a-Si:H devices." Vacuum. 45 (1994): 1109-1111. AbstractWebsite

Pin solar cells of a-Si:H were light soaked. The cell characteristics, the optoelectronic properties and the microstructure parameter, as well as the hydrogen content and density of states of the i-layer, were monitored throughout the entire light-induced degradation process and compared with the corresponding μτ product (for both carriers) inferred through steady photoconductivity and FST measurements. Results suggest a correlation between the decrease of μτ product for electrons and the increase of the fraction of hydrogen bonded on internal surfaces, showing structural changes during the degradation process. © 1994.

Gonçalves, G., Elangovan Barquinha Pereira Martins Fortunato E. P. L. "Influence of post-annealing temperature on the properties exhibited by ITO, IZO and GZO thin films." Thin Solid Films. 515 (2007): 8562-8566. AbstractWebsite

In this work we present a study on the effect of annealing temperatures on the structural, morphological, electrical and optical characteristics of gallium doped zinc oxide (GZO), indium zinc oxide (IZO) and indium-tin-oxide (ITO) films. GZO and IZO films were deposited at room temperature by r.f. magnetron sputtering, whereas the ITO films were commercial ones purchased from Balzers. All films were annealed at temperatures of 250 and 500 °C in open air for 1 h. The GZO and ITO films were polycrystalline. The amorphous structure of as-deposited IZO films becomes crystalline on high temperature annealing (500 °C). The sheet resistivity increased with increase in annealing temperature. GZO films showed an increase of 6 orders of magnitude. The optical transmittance and band gap of as-deposited films varied with annealing. The highest transmittance (over 95 %) and maximum band gap (3.93 eV) have been obtained for ITO films. © 2007 Elsevier B.V. All rights reserved.

Lyubchyk, A., Vicente Alves Catela Soule Mateus Mendes Águas Fortunato Martins A. P. U. "Influence of post-deposition annealing on electrical and optical properties of ZnO-based TCOs deposited at room temperature." Physica Status Solidi (A) Applications and Materials Science. 213 (2016): 2317-2328. AbstractWebsite

The post-deposition modification of ZnO-based transparent conductive oxides (TCOs) can be the key to produce thin films with optoelectronic properties similar to indium tin oxide (ITO), but at a much lower cost. Here, we present electro-optical results achieved for post-deposition annealing of Al–Zn–O (AZO), AZO:H, Ga–Zn–O:H (GZO:H), and Zn–O:H (ZNO:H) thin films deposited by RF sputtering at room temperature. These studies comprise results of thermal annealing at atmospheric pressure, vacuum, forming gas, H2 and Ar atmospheres, and H2 and Ar plasmas, which lead to significant enhancement of their electro-optical properties, which are correlated to morphological and structural improvements. The post-deposition annealing leads to an enhancement in resistivity above 40% for AZO, AZO:H, and GZO:H, reaching ρ ≈ 2.6–3.5 × 10−4 Ωcm, while ZnO:H showed a lower improvement of 13%. The averaged optical transmittance in the visible region is about 89% for the investigated TCOs. Such results match the properties of state-of-art ITO (ρ ≈ 10−4 Ωcm and transmittance in VIS range of 90%) employing much more earth-abundant materials. © 2016 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim

Kondaiah, P.a, Sekhar Chandra Martins Uthanna Elangovan M. C. a S. "Influence of substrate bias voltage on the physical, electrical and dielectric properties of RF magnetron sputtered TiO 2 films." IOP Conference Series: Materials Science and Engineering. Vol. 30. 2012. Abstract

Titanium oxide (TiO 2) finds potential applications in various fields such as solar cells, optical coatings due to its high refractive index and it also has been widely used in memory devices owing to its high dielectric constant. TiO 2 films have been deposited on p-type silicon (100) substrates by RF magnetron sputtering technique. Thickness, structure and surface morphology of the films were analyzed by using α-step profilometer, Raman spectroscopy and atomic force microscope respectively. Thin film capacitors of the type Al/TiO 2/Si were fabricated by evaporation of Aluminium on to the TiO 2 films. The current - voltage and capacitance - voltage characteristics were carried out to understand the electrical conduction and dielectric properties of the deposited films with a stack of Al/TiO 2/Si. The leakage current density was decreased and capacitance was increased with increase of substrate bias voltage.

do Wang, J.a, Sallet Jomard Botelho Rego Elamurugu Martins Fortunato V. b F. b. "Influence of substrate temperature on N-doped ZnO films deposited by RF magnetron sputtering." Thin Solid Films. 515 (2007): 8785-8788. AbstractWebsite

Nitrogen-doped ZnO films were deposited by RF magnetron sputtering in 75% of N2 / (Ar + N2) gas atmosphere. The influence of substrate temperature ranging from room temperature (RT) to 300 °C was analyzed by X-ray diffractometry (XRD), spectrophotometry, X-ray photoelectron spectroscopy (XPS), secondary-ion mass spectrometry (SIMS) and Hall measurements setup. The XRD studies confirmed the hexagonal ZnO structure and showed that the crystallinity of these films increased with increasing substrate temperature (Ts). The optical studies indicate the average visible transmittance in the wavelength ranging 500-800 nm increases with increasing Ts. A minimum transmittance (9.84%) obtained for the films deposited at RT increased with increasing Ts to a maximum of 88.59% at 300 °C (500-800 nm). Furthermore, it was understood that the band gap widens with increasing Ts from 1.99 eV (RT) to 3.30 eV (250 °C). Compositional analyses (XPS and SIMS) confirmed the nitrogen (N) incorporation into the ZnO films and its decreasing concentration with increasing Ts. The negative sign of Hall coefficients confirmed the n-type conducting. © 2007 Elsevier B.V. All rights reserved.

Zubizarreta, C.a, G-Berasategui Ciarsolo Barriga Gaspar Martins Fortunato E. a I. a. "The influence of target erosion grade in the optoelectronic properties of AZO coatings growth by magnetron sputtering." Applied Surface Science. 380 (2016): 218-222. AbstractWebsite

Aluminum-doped zinc oxide (AZO) transparent conductor coating has emerged as promising substitute to tin-doped indium oxide (ITO) as electrode in optoelectronic applications such as photovoltaics or light emitting diodes (LEDs). Besides its high transmission in the visible spectral region and low resistivity, AZO presents a main advantage over other candidates such as graphene, carbon nanotubes or silver nanowires; it can be deposited using the technology industrially implemented to manufacture ITO layers, the magnetron sputtering (MS). This is a productive, reliable and green manufacturing technique. But to guarantee the robustness, reproducibility and reliability of the process there are still some issues to be addressed, such as the effect and control of the target state. In this paper a thorough study of the influence of the target erosion grade in developed coatings has been performed. AZO films have been deposited from a ceramic target by RF MS. Structure, optical transmittance and electrical properties of the produced coatings have been analyzed as function of the target erosion grade. No noticeable differences have been found neither in optoelectronic properties nor in the structure of the coatings, indicating that the RF MS is a stable and consistent process through the whole life of the target. © 2016 Elsevier B.V.

Nunes, P., Fortunato Martins E. R. "Influence of the annealing conditions on the properties of ZnO thin films." International Journal of Inorganic Materials. 3 (2001): 1125-1128. AbstractWebsite

The effect of annealing treatment (in the presence of different types of atmospheres) on the performances of zinc oxide thin films (intrinsic and doped with In and Al) prepared by spray pyrolysis have been studied, with the aim to determine more adequate conditions to improve the properties of the films. The results show that the annealing treatment leads to substantial changes in the structural, electrical and optical characteristics of ZnO thin films. The most significant improvements were obtained after annealing in forming gas (reduction atmosphere) at 200°C during 2 h. The ZnO:In film after heat treatment was the one that exhibited the lowest resistivity (p=5.2x10-2 ωcm) and a high transmittance (T=86%). © 2001 Elsevier Science Ltd. All rights reserved.

Nunes, P., Fortunato Lopes Martins E. A. R. "Influence of the deposition conditions on the gas sensitivity of zinc oxide thin films deposited by spray pyrolysis." International Journal of Inorganic Materials. 3 (2001): 1129-1131. AbstractWebsite

In this work we present preliminary results on the sensitivity to methane gas of zinc oxide thin films deposited by spray pyrolysis. It was found that using highly resistive (above 104 Ω cm) thin films and by performing the measurements at 200°C a sensitivity better than one order of magnitude was found to detect 2000 ppm of methane. A linear dependence on the sensitivity between 100 and 2000 ppm of methane was also obtained. © 2001 Elsevier Science Ltd. All rights reserved.

Barquinha, P., Pereira Águas Fortunato Martins L. H. E. "Influence of the deposition conditions on the properties of titanium oxide produced by r.f. magnetron sputtering." Materials Science in Semiconductor Processing. 7 (2004): 243-247. AbstractWebsite

This work refers to the electro-optical and structural characteristics of titanium oxide (TiOx) thin films produced by radio frequency (r.f.) magnetron sputtering that present promising performances for gate dielectric applications, alone or in mixed tandem structures, such as with Al yOz films, taking advantage of its high dielectric constant. Films produced with a O2/Ar ratio between 0.1 and 0.15 present an improved stochiometry and density where the resistivity overcomes 1011 Ω cm and the fixed charge density decreases below 10 12 cm-2. The deposition pressure influences greatly the growth rate that seems to be a determinant factor dictating the films properties. © 2004 Elsevier Ltd. All rights reserved.

Assunção, V.a, Fortunato Marques Águas Ferreira Costa Martins E. a A. a. "Influence of the deposition pressure on the properties of transparent and conductive ZnO:Ga thin-film produced by r.f. sputtering at room temperature." Thin Solid Films. 427 (2003): 401-405. AbstractWebsite

Highly conducting and transparent gallium doped zinc oxide thin films have been deposited at high growth rates by r.f. magnetron sputtering at room temperature on inexpensive soda lime glass substrates. The argon sputtering pressure was varied between 0.15 and 2.1 Pa. The lowest resistivity was 2.6 × 10-4 Ω cm (sheet resistance ≈6 Ω/sq. for a thickness ≈600 nm) and was obtained at an argon sputtering pressure of 0.15 Pa and a r.f. power of 175 W. The films present an overall transmittance in the visible spectra of approximately 90%. The increase on the resistivity for higher sputtering pressures is due to a decrease of both, mobility and carrier concentration, and is associated to a change on the surface morphology. The low resistivity, accomplished with a high growth rate (290 Å/min) and with a room temperature deposition enables these films deposition onto polymeric substrates for flexible optoelectronic devices. © 2002 Elsevier Science B.V. All rights reserved.