Rodrigo Martins

In this work a study of the influence of the annealing treatment (atmosphere and temperature) on the properties of zinc oxide thin films (intrinsic and doped with indium and aluminum) prepared by spray pyrolysis is presented. The result shows that the type of atmosphere (reduction or oxidant) has an important role in the changes observed in the structural, electrical and optical properties of the ZnO thin films. The ZnO thin film doped with indium, presents the lowest resistivity (ρ = 5.8×10-3 Ωcm) associated to a high transmittance (T = 86%), characteristics required for application on optoelectronic devices.

This paper presents results of the role of the oxygen concentration (CO) and the deposition pressure (pd) on structural and electrical properties of indium tin oxide films produced by r.f. magnetron sputtering. The films were annealed in air, followed by a reannealed stage in hydrogen, aiming to improve the film's transparency and conductivity. The results achieved show that the films texture grain size, structure and compactness is more influenced by CO than by pd, the same does not happen with the electrical properties.

The variation of the structure, morphology and the electrical properties of thin amorphous silicon films caused by Rapid Thermal Annealing is studied. The films annealed at 1200°C for 2 minutes change their structure to polycrystalline and as a result their resistivity decreases by 4 orders of magnitude. Due to the small thickness of the as deposited amorphous silicon the obtained poly-Si is strongly irregular and has many discontinuities in its texture.

Nitrogen (N)-doped ZnO thin films were RF sputtered with different N2 volume (ranging from 10% to 100%) on sapphire (001) substrates. The influence of N2 vol.% on the properties of ZnO films was analyzed by various characterization techniques. The X-ray diffraction studies showed that the films grow along the preferential (002) crystallographic plane and the crystallinity varied with varying N2 vol.%. The films sputtered with 25 vol.% N2 showed better crystallinity. The transmittance was decreased with increasing N2 volume until 25% and was almost constant above 25%. A maximum optical band gap (2.08 eV) obtained for 10 vol.% N2 decreased with increasing N2 volume to reach a minimum of 1.53 eV at 100%. The compositional analysis confirmed the incorporation of N into ZnO films, and its concentration increased with increasing N2 volume to reach a maximum of ∼ 3.7 × 1021 atom/cm3 at 75% but then decreased slightly to 3.42 × 1021 atoms/cm3. The sign of Hall coefficient confirmed that the films sputtered with ≤ 25 vol.% N2 possess p-type conductivity which changes to n-type for > 25 vol.% N2. © 2007 Elsevier B.V. All rights reserved.

ZnO films with and without a self-buffer layer were grown on c-plane sapphire substrates by atmospheric metal organic chemical vapor deposition. The influence of the buffer layer thickness, annealing temperature and annealing time on ZnO films has been investigated. The full width at half maximum of the ω-rocking curve of the optimized self-buffer layer sample is only 395 arc sec. Its surface is composed of regular columnar hexagons. After the buffer layer was introduced, the A1 longitudinal mode peak at 576 cm- 1, related to the defects, disappears in Raman spectra. For the photoluminescence, besides the strong donor binding exciton peak at 3.3564 eV, an ionized donor binding exciton and a free exciton peak is respectively observed at 3.3673 and 3.3756 eV at the high-energy side in the spectrum of the sample with the buffer layer. © 2006 Elsevier B.V. All rights reserved.

Multicomponent amorphous oxides are starting to emerge as a class of appealing semiconductor materials for application in transparent electronics. In this work, a high performance bottom-gate n-type transparent thin-film transistors are reported, being the discussion primarily focused on the influence of the indium zinc oxide active layer thickness on the properties of the devices. For this purpose, transparent transistors with active layer thicknesses ranging from 15 nm to 60 nm were produced at room temperature using rf magnetron sputtering. Optical transmittance data in the visible range reveals average transmittance higher than 80%, including the glass substrate. The devices work in the enhancement mode and exhibit excellent saturation drain currents. On-off ratios above 107 are achieved, but this value tends to be lower for devices with thicker semiconductor films, as a result of the decrease in the resistance of the channel region with increasing thickness. Channel mobilities are also quite respectable, with some devices presenting values around 40 cm2/V s, even without any annealing or other post-deposition improvement processes. Concerning the evolution of threshold voltage with the thickness, this work shows that it increases from about 3 V in thicker films up to about 10 V in the thinnest ones. The interesting electrical properties obtained and the versatility arising from the fact that it is possible to modify them changing only the thickness of the semiconductor makes this new transparent transistors quite promising for future transparent ICs. © 2006 Elsevier B.V. All rights reserved.

Tensile tests were performed on PET films coated with Al doped zinc oxide films by RF magnetron sputtering. During the tensile elongation, the electrical resistance of the oxide was evaluated in situ. The results indicate that the increase in the electrical resistance is related to the crack debsity and crack width, which also depends on the film thickness.

Metal nanoparticles are of great interest for light trapping in photovoltaics. They are usually incorporated in the rear electrode of solar cells, providing strong light scattering at their surface plasmon resonances. In most cases, the nanoparticles are self-assembled by solid-state dewetting over a transparent conductive oxide (TCO) layer incorporated in the cell's rear electrode. Up to now, this process has been optimized mainly by tuning the thermal annealing parameters responsible for dewetting, or the thickness of the precursor metallic layer; but little attention has been paid to the influence of the underlying TCO layer properties on the morphology of the nanoparticles formed, which is the focus of the present article. This work investigates Ag nanoparticles structures produced on distinct surfaces by a simple, fast and highly reproducible method employing rapid thermal annealing. The results indicate that both the thermal conductivity and surface roughness of the TCO layer play a determinant role on the morphology of the nanostructures formed. This is of particular relevance, since we show in the study performed that the parasitic absorption of these Ag nanostructures is reduced, while the scattering is enhanced when the Ag nanostructures are formed on TCO layers with the highest conductivity and the lowest surface roughness (∼1 nm). These results unveil novel possibilities for the improvement of plasmonic nanostructures fabricated by thermal dewetting, via the careful adjustment of the physical properties of the underlying surface. © 2016 American Chemical Society.

In this work we present a study concerning the influence of some of the most important external factors on the electrical properties of transparent thin-film transistors (TFTs), using zinc oxide produced at room temperature as the semiconductor material. Electrical characterization performed sixteen months after the production of the devices showed a decrease in the on/off ratio from 8×105 to 1×105, mainly due to the increase of the off-current. We also observed a small increase in the saturation mobility, a decrease in the threshold voltage and an increase in the gate voltage swing (by factors of about 1.2, 0.9 and 1.6, respectively). Exposure to ambient light does not have a noticeable effect on the electrical properties, which is an important point as regards the application of these devices in active matrix displays. Some variation of the electrical properties was only detectable under intense white light radiation. In order to evaluate the temperature effect on the TFTs, they were also characterized at 90 °C. At this temperature we noticed that the off-current increased more than two times, and the other electrical properties had a small variation, returning to their initial values after cooling, meaning that the process is totally reversible. © 2005 Elsevier Ltd. All rights reserved.

This letter presents a novel high-gain four-quadrant analog multiplier using only n-type enhancement indium- gallium-zinc-oxide thin-film-transistors. The proposed circuit improves the gain by using an active load with positive feedback. A Gilbert cell with a diode-connected load is also presented for comparison purposes. Both circuits were fabricated on glass at low temperature (200 °C) and were successfully characterized at room temperature under normal ambient conditions, with a power supply of 15 V and 4-pF capacitive load. The novel circuit has shown a gain improvement of 7.2 dB over the Gilbert cell with the diode-connected load. Static linearity response, total harmonic distortion, frequency response, and power consumption are reported. This circuit is an important signal processing building block in large-area sensing and readout systems, specially if data communication is involved. © 2016 IEEE.

A dye sensitized TiO2 photodetector has been integrated with a DNA detection method based on non-cross-linking hybridization of DNA-functionalized gold nanoparticles, resulting in a disposable colorimetric biosensor. We present a new approach for the fabrication of dye sensitized TiO2 photodetectors by an inkjet printing technique-a non-contact digital, additive, no mask and no vacuum patterning method, ideal for cost efficient mass production. The developed biosensor was compared against a dye sensitized photodetector fabricated by the traditional "doctor blade" method. Detection of gold nanoparticle aggregation was possible for concentrations as low as 1.0 nM for the "doctor blade" system, and 1.5 nM for the inkjet printed photodetector. The demonstrated sensitivity limits of developed biosensors are comparable to those of spectrophotometric techniques (1.0 nM). Our results show that a difference higher than 17% by traditional photodetector and 6% by inkjet printed in the photoresponses for the complementary and non-complementary gold nanoprobe assays could be attained for a specific DNA sequence from Mycobacterium tuberculosis, the etiologic agent of human tuberculosis. The decrease of costs associated with molecular diagnostic provided by a platform such as the one presented here may prove of paramount importance in developing countries. © 2009 Elsevier B.V. All rights reserved.

The aim of presented work is to show the improvements obtained in the properties of TiO2 films for dye sensitized solar cells fabricated by inkjet printing using an innovative methodology. We describe the development and properties of TiO2-based inks used in a lab-scale printer, testing various commercial TiO2 pastes. The porosity of the deposited inkjet printed TiO2 films is much higher than using the conventional "doctor blade" deposition technique, as the ink solvent evaporates during the droplet fly from the nozzle to the substrate due to its picoliter volume and the applied heating of a printing stage (70°C). Thanks to higher surface area, the dye sensitized solar cells incorporating inkjet printed TiO2 film gave higher efficiencies (ηmax≈3.06%) than the more compact films obtained by the "doctor blade" method (ηmax≈2.56%). Furthermore, electrochemical analysis indicates that for whole tested thickness range, the inkjet printed layers have higher effective electron diffusion length indicating their better transport properties. © 2015 Elsevier Inc..

{A nonvacuum and low temperature process for passivating transparent metal oxides based thin-film transistors is presented. This process uses the epoxy-based SU-8 resist which prevents device degradation against environmental conditions, vacuum or sputtering surface damage. The incorporation of SU-8 as a passivation layer is based on the ability of this polymer to provide features with high mechanical and chemical stability. With this approach, lithography is performed to pattern the resist over the active area of the device in order to form the passivation layer. The resulting transistors demonstrate very good electrical characteristics, such as μFE =61 cm2 /V s

This work aims to report results of the spatial and frequency optical detection limits of integrated arrays of 32 one-dimensional amorphous silicon thin film position sensitive detectors with nip or MIS structure, under continuous and pulsed laser operation conditions. The arrays occupy a total active area of 45 mm2 and have a plane image resolution better than 15 μm with a cut-off frequency of about 6.8 kHz. The non-linearity of the array components varies with the frequency, being about 1.6% for 200 Hz and about 4% for the cut-off frequency (6.8 kHz).

This paper deals with the interpretation of transport properties of amorphous silicon hydrogenated films (a-Si:H) through dark conductivity, photoconductivity and pulse controlled capacitance-voltage measurements. a-Si:H films were produced by rf glow discharge coupled either inductively or capacitively to a 3% SiH4/Ar mixture at different crossed electromagnetic static fields. The data concerned with the dark activation energy, photoactivation energy, variation of the density of localized states and photosensitivity, (σph/σd)25°C, of a-Si:H films can account for their optoelectronic properties which are strongly dependent on the deposition parameters. We also observed that crossed electromagnetic static fields applied during film formation influences hydrogen incorporation in a different manner than previously proposed. © 1983.

In this work, we present a model to interpret the steady-state and the dynamic detection limits of 1-D Thin Film Position Sensitive Detectors (1-D TFPSD) based on p-i-n a-Si:H devices. From this, an equivalent electric circuit is derived and the predicted values are compared with the experimental results obtained in 1-D TFPSD devices, with different sizes. The model is also able to determine the device characteristics that influence the spatial limits and the response time of the device. © 1996 IEEE.

Oxide semiconductor thin-film transistors can show anomalous behavior under bias stress. Two types of anomalies are discussed in this paper. The first is the shift in threshold voltage (VTH) in a direction opposite to the applied bias stress, and highly dependent on gate dielectric material. We attribute this to charge trapping/detrapping and charge migration within the gate dielectric. We emphasize the fundamental difference between trapping/detrapping events occurring at the semiconductor/dielectric interface and those occurring at gate/dielectric interface, and show that charge migration is essential to explain the first anomaly. We model charge migration in terms of the non-instantaneous polarization density. The second type of anomaly is negative VTH shift under high positive bias stress, with logarithmic evolution in time. This can be argued as electron-donating reactions involving H2O molecules or derived species, with a reaction rate exponentially accelerated by positive gate bias and exponentially decreased by the number of reactions already occurred. © 2016 Author(s).

ZnO films were deposited on c-plane sapphire substrates in Ar atmosphere by ii magnetron sputtering and were post-annealed at 400°C in green gas (95% N2 + 5% H2). The properties of the as-grown and annealed films have been characterized by X-ray diffraction (XRD), Rutherford backscattering (RBS), elastic recoil detection analysis (ERDA), Hall measurement and photoluminescence spectra. XRD studies confirmed the variation in strain and an improvement in crystallinity. From RBS and ERDA analysis, the presence of H atoms on the surface of the as-grown ZnO films was evidenced. Annealing in green gas increased the amount of H in the film. Compared with the as-grown films, the ultra exciting intensity obviously decreases in the annealed films and new optical active centres in the blue/violet ( 3.0 eV) and red ( 1.9) regions are emerged in the PL spectrum. The positive sign of Hall coefficient confirmed the low (-type conductivity in the as grown films, which was improved after annealing. However, the (-type conductivity was not stable, especially for the annealed sample it changes from ( type to n type after 9 days. Copyright © 2009 American Scientific Publishers All rights reserved.

This paper presents the results achieved in optimized 1D position sensitive detectors (PSD) using a metal-insulator-semiconductor (MIS) structure and different length to width ratios, in order to determine the optimal geometrical factor for the desired 3D integration. The results show that the optimized MIS PSD produced, exhibited linearity errors as low as 0.8% and sensitivities of 32 mV/cm, for a 5 mW spot beam intensity at a wavelength of 532 nm. The sensors can achieve a longitudinal spatial resolution of 1.25 μm (estimated by modulation transfer function calculation), while the transverse resolution depends on the minimum width used for each sensor. The calculated Jones parameter of the sensors is higher than 1011 J, with a fall-off parameter of 0.012 cm-1, indicating a high signal to noise detection ratio. © 2006 Elsevier B.V. All rights reserved.

In the present work, we investigate the influence of hydrocarbon (CHx) thin film coating on porous silicon (PS) by plasma enhanced chemical vapor deposition (PECVD) technique to detect CO2 gas. The fabricated CHx/PS heterojunction device shows up to one and two orders of magnitude enhancement in current under CO2 gas exposure. FTIR spectroscopy measurements reveal a remarkable structural modification of the CHx/PS device during CO2 gas exposure. Further, the enhancement of CHx related absorbance bands by a factor 6.2 for the CHx/PS specimen in comparison with PS confirm the good quality of the deposited CHx thin films. © 2007 Elsevier B.V. All rights reserved.

Molybdenum (0.5at%) doped indium oxide thin films deposited by spray pyrolysis technique were irradiated by 100MeV O 7+ ions with different fluences of 5×10 11, 1×10 12 and 1×10 13ions/cm 2. Intensity of (222) peak of the pristine film was decreased with increase in the ion fluence. Films irradiated with the maximum ion fluence of 1×10 13ions/cm 2 showed a fraction of amorphous nature. The surface microstructures on the surface of the film showed that increase in ion fluence decreases the grain size. Mobility of the pristine molybdenum doped indium oxide films was decreased from  122 to 48cm 2/Vs with increasing ion fluence. Among the irradiated films the film irradiated with the ion fluence of 5×10 11ions/cm 2 showed relatively low resistivity of 6.7×10 -4Ωcm with the mobility of 75cm 2/Vs. The average transmittance of the as-deposited IMO film is decreased from 89% to 81% due to irradiation with the fluence of 5×10 11ions/cm 2. © 2012 Elsevier Ltd.

We have deposited by Plasma Enhanced Chemical Vapour Deposition phosphorus doped amorphous and microcrystalline silicon films, as a function of the RF power (10-300 W), using a PH3/(SiH4 + H2 + He)mixture. It was found that films microcrystallization occurs for powers above 130 W, where a clear phase transition occurs. The microcrystalline films produced present high dark conductivities and optical band gaps, where the crystalline volume fraction is above 25%, as revealed by micro Raman spectroscopy. The Hall mobility have been also determined for amorphous and microcrystalline films, as a function of temperature, in the range 280-340 K. The data show that for the microcrystalline films the conduction is mainly in the extended states of the microcrystals, confirming also the double sign anomaly. That is, for n-type films, the sign is positive for the amorphous case while it is negative for the microcrystalline case. © 1998 Elsevier Science S.A.

High visible to near infrared (NIR) transparent Mo (0-1 at%) doped In2O3 (IMO) thin films with high carrier mobility were deposited on Corning-1737 glass substrates at 400 °C by spray pyrolysis experimental technique. The films were annealed in vacuum (∼1×10-4 mbar) at 550 °C for 45 min. XRD analysis confirmed that indium oxide belongs to cubic bixbyite structure. The preferred growth orientation along (2 2 2) plane for low Mo doping level shifts to (4 0 0) for higher Mo doping levels. Crystallite sizes extracted from the XRD data corroborate the changes in full-width at half-maximum due to the variation in Mo doping. Scanning electron microscopy study illustrates the evolution in surface microstructures as a function of Mo doping. The negative sign of Hall coefficient confirmed n-type conductivity. Films with high mobility of ∼149 cm2/(V s), carrier concentration of ∼1.0×1020 cm-3, resistivity of ∼4.0×10-4 Ω cm and high figure of merit of ∼1.02×10-2 Ω-1 were observed for post-annealed films (0.5 at% Mo). The obtained high average transparency of ∼83% in the wavelength range 400-2500 nm confirms that transmittance is well extended into the NIR region. © 2009 Elsevier B.V. All rights reserved.

This work presents for the first time a study on the deposition of polymorphous silicon at an excitation frequency of 27.12 MHz in a large-area plasma enhanced chemical vapor deposition (PECVD) reactor. Moreover, the films produced at 13.56 MHz were also investigated to compare their performance with that of the films produced at 27.12 MHz. The SiH4/H2 plasma was characterized by impedance probe measurements, aiming to identify the plasma conditions that lead to produce polymorphous films, under quasi-isothermal conditions. The films were characterized by spectroscopic ellipsometry, infrared absorption, Raman spectroscopy, and hydrogen exodiffusion experiments. These techniques enable a detailed structural characterization of the polymorphous films and a study of the differences between the films deposited at 27.12 MHz and 13.56 MHz. Conductivity measurements were also performed to determine the transport properties of the films. The results show that by using a 27.12 MHz frequency, the growth rate increased by 70% and a more stable, relaxed and denser structure was obtained.

In recent works large area hydrogenated amorphous silicon p-i-n structures with low conductivity doped layers were proposed as single element image sensors. The working principle of this type of sensor is based on the modulation, by the local illumination conditions, of the photocurrent generated by a light beam scanning the active area of the device. In order to evaluate the sensor capabilities is necessary to perform a response time characterization. This work focuses on the transient response of such sensor and on the influence of the carbon contents of the doped layers. In order to evaluate the response time a set of devices with different percentage of carbon incorporation in the doped layers is analyzed by measuring the scanner-induced photocurrent under different bias conditions. © 2004 Elsevier B.V. All rights reserved.