Ferreira, I., Águas Pereira Fortunato Martins H. L. E. "
Properties of a-Si:H intrinsic films produced by HWPA-CVD technique."
Thin Solid Films. 451-452 (2004): 366-369.
AbstractIn this paper, we investigate the optoelectronic properties and the photodegradation of amorphous silicon films produced by the hot wire plasma assisted technique (HWPA-CVD). We observed that hydrogen dilution in the gas phase plays an important role in the time dependence of the photoconductivity, which is correlated with an enhancement of defect density. We also compare the degradation of these films with those produced by plasma enhanced and by hot wire chemical vapour deposition techniques (PECVD and HW-CVD) and we found lower time dependence for the photodegradation of the films produced by HWPA-CVD technique © 2003 Elsevier B.V. All rights reserved.
Nunes, P., Fortunato Martins Vilarinho E. R. P. "
Properties presented by ZnO thin films deposited by magnetron sputtering and spray pyrolysis."
Key Engineering Materials. 230-232 (2002): 424-427.
AbstractThe most common techniques used to produce ZnO thin films are the spray pyrolysis and the magnetron sputtering techniques, low and high cost processes respectively. The aim of this work is to compare the properties of the films produced by these two techniques. The predominant difference observed was on the morphological properties. The films produced by spray pyrolysis have a rougher surface than the ones obtained by sputtering. Also the effect of the thermal annealing treatment is much more prononnced for the ZnO thin films produced by spray pyrolysis. After heat treatment films exhibit similar electrical properties and their application to optoelectronic devices is demonstrated.